6.780 | Spring 2003 | Graduate

Semiconductor Manufacturing

Calendar

LEC # TOPICS KEY DATES
1 Overview of Semiconductor Manufacturing

Statistical Process Control
2 Statistics Review: Distributions

3 Statistics Review: Estimation PS #1 Due
4 Hypothesis Tests and Control Chart Introduction

5 Control Charts

6 Advanced Control Charts, Nested Variance PS #2 Due
Experimental Design
7 Analysis and Design of Experiments

8 ANOVA, Variance Component Estimation PS #3 Due
9 MANOVA, Factorial Experiments

Quiz #1

Yield and Yield Learning
10 Design of Experiments and Response Surface Modeling

11 RSM and Regression PS #4 Due
12 Yield Management and Modeling

13 Yield Modeling PS #5 Due
Advanced Process Control
14 Spatial Modeling

15 Sensors and Signals PS #6 Due
16 PCA and Time Series

17 Run by Run Control Critical Paper Review Due
18 Real Time Control, Scheduling

Factory Operation and Design
19 Scheduling

Quiz #2

PS #7 Due
20 Planning

21 Factory Design and Efficiency

Course Info

Instructor
As Taught In
Spring 2003
Level
Learning Resource Types
Exams
Lecture Notes
Projects
Written Assignments
Problem Sets
Problem Set Solutions