Control of Manufacturing Processes (SMA 6303)

Lecture Slides

SES #	LECTURE SLIDES
1	Introduction—Processes and Variation Framework (PDF)
2	Semiconductor Process Variation (PDF - 2.2MB)
3	Mechanical Process Variation (PDF - 1.3MB)
4	Probability Models of Manufacturing Processes (PDF)
5	Probability Models, Parameter Estimation, and Sampling (PDF)
6	Sampling Distributions and Statistical Hypotheses (PDF)
7	Shewhart SPC and Process Capability (PDF)
8	Process Capability and Alternative SPC Methods (PDF)
9	Advanced and Multivariate SPC (PDF)
10	Yield Modeling (PDF)
11	Introduction to Analysis of Variance (PDF)
12	Full Factorial Models (PDF)
13	Modeling Testing and Fractional Factorial Models (PDF)
14	Aliasing and Higher Order Models (PDF)
15	Response Surface Modeling and Process Optimization (PDF)
16	Process Robustness (PDF)
17	Nested Variance Components (PDF)
18	Sequential Experimentation (PDF)
19	Case Study 1: Tungsten CVD DOE/RSM (PDF)
20	Case Study 2: Cycle to Cycle Control (PDF)
21	Case Study 3: Spatial Modeling (PDF)
22	Case Study 4: “Modeling the Embossing/Imprinting of Thermoplastic Layers.” (PDF - 2.4MB)