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Course Info

Instructors
  • Prof. Carol Livermore
  • Prof. Joel Voldman
Departments
  • Electrical Engineering and Computer Science
  • Mechanical Engineering
As Taught In
Spring 2007
Level
Graduate
Topics
  • Engineering
    • Electrical Engineering
      • Electronics
    • Mechanical Engineering
      • Microtechnology
    • Nanotechnology
  • Science
    • Physics
      • Electromagnetism
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assignment_turned_in Problem Sets with Solutions
notes Lecture Notes
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6.777J | Spring 2007 | Graduate

Design and Fabrication of Microelectromechanical Devices

  • Syllabus

  • Calendar

  • Readings

  • Lecture Notes

  • Assignments

  • Projects

Lecture Notes

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360 kB
07lecture01_p2.pdf
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07lecture01.pdf
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07lecture02.pdf
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07lecture03.pdf
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07lecture04_fab.pdf
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07lecture05.pdf
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07lecture06e.pdf
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07lecture06split.pdf
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07lecture07e.pdf
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07lecture07split.pdf
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07lecture08.pdf
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07Lecture09.pdf
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07lecture10.pdf
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07lecture11.pdf
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07lecture12.pdf
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07Lecture13.pdf
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07lecture14.pdf
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07lecture15.pdf
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07lecture16.pdf
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07lecture17.pdf
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07lecture18.pdf
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07lecture19.pdf
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07lecture20_accl.pdf
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07lecture21.pdf
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07lecture22.pdf
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07lecture23.pdf
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07lecture24.pdf
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07lecture25.pdf

Course Info

Instructors
  • Prof. Carol Livermore
  • Prof. Joel Voldman
Departments
  • Electrical Engineering and Computer Science
  • Mechanical Engineering
As Taught In
Spring 2007
Level
Graduate
Topics
  • Engineering
    • Electrical Engineering
      • Electronics
    • Mechanical Engineering
      • Microtechnology
    • Nanotechnology
  • Science
    • Physics
      • Electromagnetism
Learning Resource Types
assignment_turned_in Problem Sets with Solutions
notes Lecture Notes
group_work Projects
assignment Programming Assignments

Download Course
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