Control of Manufacturing Processes (SMA 6303)
1: Introduction — Processes and Variation Framework
2: Semiconductor Process Variation
3: Mechanical Process Variation
4: Probability Models of Manufacturing Processes
5: Probability Models, Parameter Estimation, and Sampling
6: Sampling Distributions and Statistical Hypotheses
7: Shewhart SPC and Process Capability
8: Process Capability and Alternative SPC Methods
9: Advanced and Multivariate SPC
10: Yield Modeling
11: Introduction to Analysis of Variance
12: Full Factorial Models
13: Modeling Testing and Fractional Factorial Models
14: Aliasing and Higher Order Models
15: Response Surface Modeling and Process Optimization
16: Process Robustness
17: Nested Variance Components
18: Sequential Experimentation
19: Case Study 1: Tungsten CVD DOE/RSM
20: Case Study 2: Cycle to Cycle Control
21: Case Study 3: Spatial Modeling
22: Case Study 4: "Modeling the Embossing/Imprinting of Thermoplastic Layers."
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